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Aaditi Joshi
Arizona State University
Computer Science & IT Electrical & Electronics Engineering Engineering

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Characterization of Capacitive Comb-finger MEMS Accelerometers Aaditi Joshi; Sangram Redkar; Thomas Sugar
Bulletin of Electrical Engineering and Informatics Vol 4, No 4: December 2015
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (793.865 KB) | DOI: 10.11591/eei.v4i4.546

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications
Characterization of Capacitive Comb-finger MEMS Accelerometers Aaditi Joshi; Sangram Redkar; Thomas Sugar
Bulletin of Electrical Engineering and Informatics Vol 4, No 4: December 2015
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (793.865 KB) | DOI: 10.11591/eei.v4i4.546

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications
Characterization of Capacitive Comb-finger MEMS Accelerometers Aaditi Joshi; Sangram Redkar; Thomas Sugar
Bulletin of Electrical Engineering and Informatics Vol 4, No 4: December 2015
Publisher : Institute of Advanced Engineering and Science

Show Abstract | Download Original | Original Source | Check in Google Scholar | Full PDF (793.865 KB) | DOI: 10.11591/eei.v4i4.546

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications
Co-Authors Sangram Redkar Thomas Sugar