Jurnal Ilmu Dasar
Vol 16 No 1 (2015)

X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er Thin Films

Iwan Sugihartono (Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220)
Esmar Budi (Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220)
Agus Setyo Budi (Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220)

Article Info

Publish Date
11 Jun 2015

Abstract

Undoped ZnO and ZnO:Er  thin films were deposited on p-type Si substrates by ultrasonic spray pyrolisis (USP). Undoped and ZnO:Er thin films have been analyzed by using X-ray Photoelectron Spectroscopy (XPS). The results show that the XPS spectrum has two Er peak at ∼157 eV and ∼168 eV. The XPS Zn 2p spectrum of undoped ZnO and ZnO:Er thin films have binding energy for Zn 2p3/2 (~ 1021 eV) and Zn 2p1/2 (~1045eV) were found no shift in binding energy after the incorporation of Er. Meanwhile, after Er incorporates into ZnO, the O 1s spectrum is composed two peak of binding energy (BE) at ~530.5eV and the shoulder about 532.5 eV.Keywords: ZnO thin films, ZnO:Er, XPS, binding energy

Copyrights © 2015




Citation Download
RIS
EndNote, Reference Manager, ProCite
BibTex
Latex, Jabref
Full PDF
307.446 KB
Original Source
Download Original
Google Scholar
Check in Google Scholar
Journal Info
Jurnal Ilmu Dasar
Website

Abbrev

JID

Publisher

Universitas Jember

Subject

Control & Systems Engineering Mathematics

Description

Jurnal ILMU DASAR (JID) is a national peer-reviewed and open access journal that publishes research papers encompasses all aspects of natural sciences including Mathematics, Physics, Chemistry and Biology. JID publishes 2 issues in 1 volume per year. First published, volume 1 issue 1, in January ...