Bulletin of Electrical Engineering and Informatics
Vol 4, No 4: December 2015

Characterization of Capacitive Comb-finger MEMS Accelerometers

Aaditi Joshi (Arizona State University)
Sangram Redkar (Arizona State University)
Thomas Sugar (Arizona State University)

Article Info

Publish Date
01 Dec 2015

Abstract

This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications

Copyrights © 2015




Citation Download
RIS
EndNote, Reference Manager, ProCite
BibTex
Latex, Jabref
Full PDF
793.865 KB
Original Source
Download Original
Google Scholar
Check in Google Scholar
Journal Info
Bulletin of Electrical Engineering and Informatics
Website

Abbrev

EEI

Publisher

Universitas Ahmad Dahlan

Subject

Electrical & Electronics Engineering

Description

Bulletin of Electrical Engineering and Informatics (Buletin Teknik Elektro dan Informatika) ISSN: 2089-3191, e-ISSN: 2302-9285 is open to submission from scholars and experts in the wide areas of electrical, electronics, instrumentation, control, telecommunication and computer engineering from the ...