Jurnal Fisika dan Terapannya
Vol 8 No 1 (2021): JUNI

PENGARUH MASSA SOURCE TERHADAP KETEBALAN THIN FILM MELALUI DEPOSISI VACUUM THERMAL EVAPORATION

Kurniati Abidin (Universitas Islam Negeri Alauddin Makassar)
Jasruddin Daud Malago (Universitas Negeri Makassar)
Fatimah Arofiati Noor (Institut Teknologi Bandung)
Toto Winata (Institut Teknologi Bandung)

Article Info

Publish Date
30 Jun 2021

Abstract

Purpose of this research to determine the effect of mass of source on thickness of thin film, with using the vacuum thermal evaporation. The metal used is Ag with a purity of 99,99% as a source of evaporated metal and using glass preparations as a substrate on which metal is deposited. By using three types of characterization such as FPP, SEM and EDS, the research results were obtained accurately. Based on  these characterizations, the results obtained a significant relationship between mass of source and thickness of thin film, increasing the mass of the source will increase the thickness of thin film. This result can be used as a reference in producing thin films with specific of thickness.

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Journal Info
Jurnal Fisika dan Terapannya
Website

Abbrev

jft

Publisher

Universitas Islam Negeri Alauddin Makassar

Subject

Physics

Description

Jurnal Fisika dan Terapannya (JFT) adalah jurnal fisika yang diterbitkan oleh Jurusan Fisika, Fakultas Sains dan Teknologi, Universitas Islam Negeri Alauddin, Makassar. Jurnal ini diterbitkan dua kali setahun pada bulan Juni dan Desember. Jurnal ini mencakup artikel penelitian dalam semua aspek ...