Journal of Enviromental Engineering and Sustainable Technology
Vol 4, No 2 (2017)

EFFECT OF CHAMBER PRESSURE ON ELECTRICAL IMPEDANCE OF A LOW-FREQUENCY NITROGEN PLASMA IN A MEDIUM VACUUM REACTOR

Dionysius Joseph Djoko Herry Santjojo (University of Brawijaya)

Article Info

Publish Date
21 Dec 2017

Abstract

The character of a low-frequency nitrogen plasma in a medium vacuum reactor was studied by determining the effect of chamber pressure on the electrical impedance of the plasma. The system understudied was a mini capacitive plasma reactor utilizing 40 kHz generator. The pressure was varied from 0.4 – 4.7 torrs. Results of this work indicated that the pressure in the range significantly affects the electrical impedance. The increase of the chamber pressure decreased the capacitive reactance while increased the resistance. The capacitive plasma indicates the plasma was controlled by excitation and ionization process, while the resistive plasma exhibits complex reactions due to collisions.

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Journal Info
Journal of Enviromental Engineering and Sustainable Technology
Website

Abbrev

JEEST

Publisher

Universitas Brawijaya

Subject

Environmental Science

Description

JEEST is an interdisciplinary and refereed journal, addresses matters related to environmental engineering and sustainable technology. Its range of themes encompasses ecological studies, field research, empirical work and descriptive analyses on topics such as environmental systems, environmental ...