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All Journal Matematika: Jurnal Teori dan Terapan JURNAL FISIKA Indonesian Journal of Pharmaceutical Science and Technology JSFK (Jurnal Sains Farmasi & Klinis) Jurnal Inovasi Hasil Pengabdian Masyarakat (JIPEMAS) Jurnal Ilmiah Farmasi Farmasyifa Poltekita: Jurnal Pengabdian Masyarakat Jurnal Riset Farmasi Makara Journal of Science Bandung Conference Series: Pharmacy
Aulia Fikri Hidayat
Program Studi Farmasi, Fakultas Matematika Dan Ilmu Pengetahuan Alam, Universitas Islam Bandung
Biochemistry, Genetics & Molecular Biology Chemistry Computer Science & IT Education Health Professions Immunology & microbiology Mathematics Medicine & Pharmacology Nursing Physics Public Health Other

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Journal : Matematika: Jurnal Teori dan Terapan

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Studi Evolusi Struktur pada Deposisi Tembaga Dalam Substrat Silikon Dengan Metode Dinamika Molekuler Aulia Fikri Hidayat
Matematika Vol 18, No 1 (2019): Jurnal Matematika
Publisher : Universitas Islam Bandung

Show Abstract | Download Original | Original Source | Check in Google Scholar | DOI: 10.29313/jmtm.v18i1.4565

Abstract

Abstrak. Metode dinamika molekuler digunakan untuk mempelajari deposisi atom tembaga (Cu) pada substrat silikon (Si). Interaksi atom-atom Si-Si, Cu-Cu, dan Cu-Si masing-masing dideskripsikan dengan potensial interatomik Tersoff, MEAM, dan Morse. Ensembel NVE dan termostat Berendsen digunakan dalam simulasi ini. Kemudian diinvestigasi pengaruh parameter kecepatan awal dan laju deposisi terhadap persentase struktur amorf, fungsi distribusi radial (RDF), dan bilangan koordinasi. Hasil simulasi menunjukkan perbedaan yang signifikan terhadap persentase struktur amorf pada parameter yang bervariasi. Investigasi pasca-simulasi menunjukkan variasi pada nilai RDF dan bilangan koordinasi.Kata kunci: Metode dinamika molekuler, evolusi struktur, fungsi distribusi radial, bilangan koordinasi Study of Structure Evolution of Copper Deposition on Silicon Substrate using Molecular Dynamics MethodAbstract. The Molecular dynamics method was used to study the deposition of copper (Cu) atoms onto silicon (Si) substrate. The interaction of Si-Si Cu-Cu, and Cu-Si atoms were described by Tersoff, MEAM, and Morse interatomic potentials respectively. NVE ensemble and Berendsen thermostat was used in this simulation. The effect of initial velocity and deposition rate on the percentage of amorphous structure, radial distribution function (RDF), and coordination number was investigated. The result showed significant differences of amorphous structure percentage at varied parameters. Post-simulation investigation showed variation in RDF and coordination number.Keywords: Molecular dynamics method, structure evolution, radial distribution function, coordination number
Co-Authors Adryan Fristiohady Atika Zulfa Karimah Bella Khofila Apriliyani Budi Prabowo Soewondo Dewi, Mentari Luthfika Dwi Syah Fitra Ramadhan Faqih Radina Faqih Radina Farha Fadila Fitrianti Darusman Gita Cahya Eka Darma Hilda Aprilia, Hilda Indrawati Hannisah Lina Jamilah Liza Dzulhijjah Nabila Shofura Mahardhika Ratih Aryani Ridwan Wijaya Rizki Nuzulfikri Rizki Nuzulfikri Robby Prayitno Robby Prayitno Robby Prayitno Syafanisa Alifia Rahma Taufik Muhammad Fakih Toto Winata Zalfa Hasna Raniah