Lara Permata Sari, Lara Permata
Jurusan Fisika, Fakultas Matematika dan Ilmu Pengetahuan Alam, Universitas Negeri Jakarta, Jl. Pemuda No. 10, Rawamangun, Jakarta 13220

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Pengaruh Jumlah Mol Zinc Asetat Dyhidrate Terhadap Struktur Kristal Lapisan Tipis ZnO (0,01; 0,02 dan 0,03 mol) Sari, Lara Permata; Handoko, Erfan; Sugihartono, Iwan
Jurnal Spektra Vol 16, No 3 (2015): Spektra: Jurnal Fisika dan Aplikasinya
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AbstrakTelah dilakukan penumbuhan lapisan tipis ZnO dengan serbuk Zn(CH3COO)2. 2H2O sebagai prekursor dan air de-ionisasi sebagai pelarut, ditumbuhkan di atas substrat Si (111) dengan menggunakan teknik Ultrasonic Spray Pyrolisis (USP). Penumbuhan  lapisan tipis ZnO tersebut menggunakan suhu tumbuh 450oC selama 10 menit, dan jarak nozzle dibuat konstan 30 cm, dengan variasi jumlah mol prekursor 0,01 mol; 0,02 mol dan 0,03 mol. Pengaruh dari jumlah mol tersebut  terhadap struktur, ukuran kristal dan parameter kisi lapisan tipis ZnO dikarakterisasi dengan X-ray diffraction (XRD). Hasil uji berdasarkan data XRD menunjukkan bahwa sampel lapisan tipis ZnO merupakan kristal dengan struktur wurtzite heksagonal. Pola puncak difraksi yang dominan yaitu (100), (002) dan (101), dan  pola puncak  lainnya yang teridentifikasi adalah(103), (201).Kata Kunci:  ZnO, molaritas, USP,  X-Ray Diffraction (XRD), Struktur Kristal. Abstract ZnO thin film with  Zn(CH3COO)2. 2H2O powder as precursor and deionized water as a solvent, ZnO films were grown on substrate Si (111) by using Ultrasonic Spray Pyrolisis (USP) technique has been carried out. The growth temperature 450oC for 10 minutes and the distance of nozzle 30 cm, with the variation of molarity of precursor are 0.01 mol; 0.02 mol and 0.03 mol. The effect of that molarity on structure, crystallite size, the lattice parameter on thin films ZnO were investigated by X-ray diffraction (XRD). The result based on XRD pattern indicated that the samples thin film ZnO are hexagonal wurtzite structure with the (100), (002) and (101) as preferential crystallographic orientation, and the other peak which identified were (103), (201).Keywords: ZnO, Molarity, USP, X-Ray Diffraction (XRD), Crystal structure. 
Structural and Photoluminescence Properties of ZnO Thin Films Deposited by Ultrasonic Spray Pyrolysis Sugihartono, Iwan; Handoko, Erfan; Fauzia, Vivi; Arkundato, Artoto; Sari, Lara Permata
Makara Journal of Technology Vol. 22, No. 1
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Abstract

Zinc oxide (ZnO) thin films on a silicon (Si) (111) substrate were grown herein using ultrasonic spray pyrolysis at 450 °C with different Zn concentrations. The ZnO thin films had X-ray diffraction patterns of a polycrystalline hexagonal wurtzite structure. The (002) and (101) peak intensities changed under different Zn concentrations. Furthermore, according to Scherer's and Stokes–Wilson equations, the crystallite size and the internal strain of the ZnO thin films in the (002) and (101) peaks changed with the Zn concentration. Optically, the photoluminescence spectra indicated that the ratio of the UV/GB emission of the ZnO thin films was the highest at the Zn concentration of 0.02 mol/mL. We predicted that by increasing the Zn concentrations, the nonradiative transitions, which originated from defects, such as lattice and surface defect, become dominant. In conclusion, the ZnO thin films with the Zn concentration of 0.02 mol/mL had a better crystalline and optical quality.