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All Journal Makara Journal of Technology
Kazutoshi Miwa, Kazutoshi
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Chemical Engineering, Chemistry & Bioengineering Civil Engineering, Building, Construction & Architecture Electrical & Electronics Engineering Engineering Materials Science & Nanotechnology Mechanical Engineering

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Development of Seebeck-Coefficient Measurement Systems Using Kelvin-Probe Force Microscopy Miwa, Kazutoshi; Salleh, Faiz; Ikeda, Hiroya
Makara Journal of Technology Vol. 17, No. 1
Publisher : UI Scholars Hub

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Abstract

Thermoelectric device is investigated by a number of researchers in order to enhance the thermoelectric efficiency. It is known that the efficiency can be improved by quantum effect. However, it is difficult to measure the thermoelectric characteristics of nanometer-scale structures. Thus a new measurement method is expected to be developed. We propose to apply Kelvin-probe force microscopy (KFM) to characterization of thermoelectric materials. KFM can locally observe surface potential of Fermi energy of a sample without touching the sample surface. In the present paper, we estimate the Seebeck coefficient of thin Si-on-insulator layers using KFM.
Co-Authors Faiz Salleh Hiroya Ikeda