Praxis : Jurnal Sains, Teknologi, Masyarakat dan Jejaring
Vol 2, No 2: Maret 2020

Analisa Desain dan Perancangan Ruang Vakum Medium Sebagai Media Pembangkitan Plasma Oksigen Menggunakan Gelombang Mikro 2,45 GHZ

Antonius Prisma Jalu Permana (Unknown)
Danang Murdiyanto (Universitas Katolik Widya Karya Malang)
Bernardus Crisanto Putra Mbulu (Universitas Katolik Widya Karya Malang)

Article Info

Publish Date
03 Jun 2020

Abstract

In line with the development of thin-film technology, its also developing plasma-based removal techniques such as plasma ashing. Plasma is an ionized gas-like phase. Ionized gas when the temperature approaches or exceeds atomic ionization energy. The atoms are ionized into positive and negative ions. The purpose of this research to analyze the working system of plasma generation using 2,45GHz microwaves. The plasma reactor was successfully operating, but it only maintain to generate plasma in short time. The reactor broke because it couldn’t hold the bombardment energy of particles which the energy was 1,623x10-24 for each every second. At last, the reactor could maintain the plasma only for ±240 s. Keywords: microwave, plasma, ashing, vacuum, mean free path, ionization.

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Journal Info
Praxis : Jurnal Sains, Teknologi, Masyarakat dan Jejaring
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praxis

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Universitas Katolik Soegijapranata

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Agriculture, Biological Sciences & Forestry Humanities Biochemistry, Genetics & Molecular Biology Chemical Engineering, Chemistry & Bioengineering Chemistry Civil Engineering, Building, Construction & Architecture Computer Science & IT Decision Sciences, Operations Research & Management Economics, Econometrics & Finance Electrical & Electronics Engineering Energy Environmental Science Health Professions Industrial & Manufacturing Engineering Languange, Linguistic, Communication & Media Law, Crime, Criminology & Criminal Justice Public Health

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PRAXIS: Jurnal Sains, Teknologi, Masyarakat dan Jejaring Jurnal Praxis merupakan jurnal ilmiah nasional yang diterbitkan oleh Lembaga Penelitian dan Pengabdian Masyarakat (LPPM) Unika Soegijapranata dan merupakan jurnal peer reviewed dan Open-Acces. Jurnal Praxis menerima artikel hasil penelitian ...